M Shikida | TU Delft Repository

MS

M Shikida

Conference paper (2)

Journal article (2)

4 records found

1

Through-wafer interconnect technology for silicon

Journal article (2004) - VG Kutchoukov (author), M Shikida (author), J.R. Mollinger (author), A. Bossche (author)

Corner rounding-powerful tool for uniform photoresist coating

Conference paper (2001) - VG Kutchoukov (author), M Bao (author), M Shikida (author), J.R. Mollinger (author), A. Bossche (author)

Forming rounded convex corner by using two-step anisotropic koh wet etching

Conference paper (2001) - VG Kiutchoukov (author), M Shikida (author), M Bao (author), J.R. Mollinger (author), A. Bossche (author)

Patterning of polyimide and metal in deep trenches

Journal article (2001) - VG Kiutchoukov (author), J.R. Mollinger (author), M Shikida (author), A. Bossche (author)