Through-wafer interconnect technology for silicon

Journal article (2004)

Authors

VG Kutchoukov Electronic Instrumentation - EEMCS
M Shikida External organisation
J.R. Mollinger Electronic Instrumentation - EEMCS
A. Bossche Electronic Instrumentation - EEMCS
Research Group
Electronic Instrumentation (EEMCS) (TU Delft)
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Published Date

2004

Language

Undefined/Unknown

Reuse Rights

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Faculty

Electrical Engineering, Mathematics and Computer Science

Department

Microelectronics

Research Group

Electronic Instrumentation