JM

J.R. Mollinger

95 records found

Authored

Patterning of polyimide and metal in deep trenches
Journal article (2001) - VG Kiutchoukov, J.R. Mollinger, M Shikida, A. Bossche

Inexpensive mems packaging
Conference paper (2001) - R Kazinczi, J.R. Mollinger, A. Bossche

Design of low-cost resonant mode sensors
Conference paper (2001) - R Kazinczi, P Turmezei, J.R. Mollinger, A. Bossche

Down-scale problems of resonant SiC devices
Conference paper (2000) - R Kazinczi, J.R. Mollinger, A. Bossche

New photoresist coating method for 3-D structured wafers
Journal article (2000) - VG Kiutchoukov, J.R. Mollinger, A. Bossche

Versatile tool for characterising long-term stability and reliabity of micromechanical structures
Journal article (2000) - R Kazinczi, J.R. Mollinger, A. Bossche

New failure mechanism in silicon nitride resonators
Conference paper (2000) - R Kazinczi, J.R. Mollinger, A. Bossche

Long-term stability of SiC resonators
Conference paper (2000) - R Kazinczi, J.R. Mollinger, A. Bossche

Coating of deep anisotropically etched grooves with polymide and photoresist
Conference paper (2000) - VG Kiutchoukov, J.R. Mollinger, A. Bossche

Patterning of polyimide and metal in deep grooves
Conference paper (2000) - VG Kiutchoukov, J.R. Mollinger, A. Bossche

Environment induced failure modes of thin film resonators
Conference paper (2000) - R Kazinczi, J.R. Mollinger, A. Bossche

Versatile tool for characterising long term stability and reliability of micromechanical structures
Conference paper (1999) - R Kazinczi, J.R. Mollinger, A. Bossche

A study of the reliability of passivation layers for sensor applications

Uniform photoresist coating of anisotropically etched cavities in silicon
Conference paper (1999) - VG Kiutchoukov, J.R. Mollinger, A. Bossche

Novel method for spinning of photoresist on wafers with through-holes
Conference paper (1999) - VG Kiutchoukov, J.R. Mollinger, A. Bossche

Mechanical aspects of reliability of micromechanical structures
Conference paper (1999) - R Kazinczi, J.R. Mollinger, A. Bossche

Novel method for spinning of photoresist on wafers with through-holes
Conference paper (1999) - VG Kiutchoukov, A. Bossche, J.R. Mollinger

Reliability of silicon nitride as structural material in MEMS
Conference paper (1999) - R Kazinczi, J.R. Mollinger, A. Bossche

Rounding of wafer - hole corners in -oriented silicon wafer by anisotropic etching
Conference paper (1999) - VG Kiutchoukov, J.R. Mollinger, A. Bossche

Magnetic-field measurements using an integrated resonant magnetic-field sensor [niet eerder opgevoerd]