In this work, we present an Opto-Electro-Mechanical Modulator (OEMM) for RF-to-optical transduction realized via an ultra-coherent nanomembrane resonator capacitively coupled to an rf injection circuit made of a microfabricated read-out able to improve the electro-optomechanical interaction. This device configuration can be embedded in a Fabry–Perot cavity for electromagnetic cooling of the LC circuit in a dilution refrigerator exploiting the opto-electro-mechanical interaction. To this aim, an optically measured steady-state frequency shift of 380 Hz was seen with a polarization voltage of 30 V and a Q-factor of the assembled device above (Formula presented.) at room temperature. The rf-sputtered titanium nitride layer can be made superconductive to develop efficient quantum transducers.

Micro- and nanomechanical resonators play a prominent part in many sensing and signal processing platforms due to their capability to pervasively couple with a wide variety of physical systems. Particularly relevant is their embedding in advanced optomechanical setups, which has recently pioneered optically cooled mechanical oscillators toward the quantum regime. A frequently adopted experimental scheme exploits a thin, highly tensioned Si 3N 4 nanomembrane where the membrane's vibrations are dispersively coupled to the optical mode of a Fabry-Pérot cavity. A significant effort has been done into realizing high-quality factor membranes, considering that low mechanical loss represents a benchmark to operate in the elusive quantum regime. In this article, we compare two state-of-the-art SiN resonators, realized exploiting the dilution of the material's intrinsic dissipation and efficient solutions to fully isolate the membrane from the substrate. In particular, we examine and discuss the interplay between the edge and distributed dissipation and propose an analytical approach to evaluate the total intrinsic loss. Also, our analysis delves into the sensitivity of the devices to a point-like force and a uniform-density force field. These results provide meaningful guidelines for designing new ultra-coherent resonating devices.

We present a complete theory for laser cooling of a macroscopic radio-frequency LC electrical circuit by means of an optoelectromechanical system, consisting of an optical cavity dispersively coupled to a nanomechanical oscillator, which is in turn capacitively coupled to the LC circuit of interest. The driven optical cavity cools the mechanical resonator, which in turn sympathetically cools the LC circuit. We determine the optimal parameter regime where the LC resonator can be cooled down to its quantum ground state, which requires a large optomechanical cooperativity, and a larger electromechanical cooperativity. Moreover, comparable optomechanical and electromechanical coupling rates are preferable for reaching the quantum ground state.