Micro- and nanomechanical resonators play a prominent part in many sensing and signal processing platforms due to their capability to pervasively couple with a wide variety of physical systems. Particularly relevant is their embedding in advanced optomechanical setups, which has recently pioneered optically cooled mechanical oscillators toward the quantum regime. A frequently adopted experimental scheme exploits a thin, highly tensioned Si 3N 4 nanomembrane where the membrane's vibrations are dispersively coupled to the optical mode of a Fabry-Pérot cavity. A significant effort has been done into realizing high-quality factor membranes, considering that low mechanical loss represents a benchmark to operate in the elusive quantum regime. In this article, we compare two state-of-the-art SiN resonators, realized exploiting the dilution of the material's intrinsic dissipation and efficient solutions to fully isolate the membrane from the substrate. In particular, we examine and discuss the interplay between the edge and distributed dissipation and propose an analytical approach to evaluate the total intrinsic loss. Also, our analysis delves into the sensitivity of the devices to a point-like force and a uniform-density force field. These results provide meaningful guidelines for designing new ultra-coherent resonating devices.

Abstract: Phenomenological models aiming to join gravity and quantum mechanics often predict effects that are potentially measurable in refined low-energy experiments. For instance, modified commutation relations between position and momentum, that account for a minimal scale length, yield a dynamics that can be codified in additional Hamiltonian terms. When applied to the paradigmatic case of a mechanical oscillator, such terms, at the lowest order in the deformation parameter, introduce a weak intrinsic nonlinearity and, consequently, deviations from the classical trajectory. This point of view has stimulated several experimental proposals and realizations, leading to meaningful upper limits to the deformation parameter. All such experiments are based on classical mechanical oscillators, i.e., excited from a thermal state. We remark indeed that decoherence, that plays a major role in distinguishing the classical from the quantum behavior of (macroscopic) systems, is not usually included in phenomenological quantum gravity models. However, it would not be surprising if peculiar features that are predicted by considering the joined roles of gravity and quantum physics should manifest themselves just on purely quantum objects. On the basis of this consideration, we propose experiments aiming to observe possible quantum gravity effects on macroscopic mechanical oscillators that are preliminary prepared in a high purity state, and we report on the status of their realization. Graphical abstract: [Figure not available: see fulltext.].

Recent optomechanical experiments have observed nonclassical properties in macroscopic mechanical oscillators. A key indicator of such properties is the asymmetry in the strength of the motional sidebands produced in the probe electromagnetic field, which is originated by the noncommutativity between the oscillator ladder operators. Here we extend the analysis to a squeezed state of an oscillator embedded in an optical cavity, produced by the parametric effect originated by a suitable combination of optical fields. The motional sidebands assume a peculiar shape, related to the modified system dynamics, with asymmetric features revealing and quantifying the quantum component of the squeezed oscillator motion.

Optomechanical SiN nano-oscillators in high-finesse Fabry-Perot cavities can be used to investigate the interaction between mechanical and optical degree of freedom for ultra-sensitive metrology and fundamental quantum mechanical studies. In this paper, we present a nano-oscillator made of a high-stress round-shaped SiN membrane with an integrated on-chip 3-D acoustic shield properly designed to reduce mechanical losses. This oscillator works in the range of 200 kHz to 5 MHz and features a mechanical quality factor of Q ≃ 10⁷ and a Q-frequency product in excess of 6.2 × 10¹² Hz at room temperature, fulfilling the minimum requirement for quantum ground-state cooling of the oscillator in an optomechanical cavity. The device is obtained by MEMS deep reactive-ion etching (DRIE) bulk micromachining with a two-side silicon processing on a silicon-on-insulator wafer. The microfabrication process is quite flexible such that additional layers could be deposited over the SiN membrane before the DRIE steps, if required for a sensing application. Therefore, such oscillator is a promising candidate for quantum sensing applications in the context of the emerging field of quantum technologies.