E. Maksimov | TU Delft Repository

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E. Maksimov

Journal article (3)

3 records found

1

Birefringe induced by the spatial dispersion in deep UV Lithography: Theory and advanced compensation strategy.

Journal article (2005) - A Serebriakov (author), E. Maksimov (author), F. Bociort (author), Florian Bociort (author), J.J.M. Braat (author), JJM Braat (author)

The effect of intrinsic birefringence in deep UV-lithography

Journal article (2004) - A Serebriakov (author), E. Maksimov (author), F. Bociort (author), Florian Bociort (author), J.J.M. Braat (author), JJM Braat (author)

Design of lithographic objectives including the effect of spatially induced birefringence

Journal article (2003) - A Serebriakov (author), E. Maksimov (author), F. Bociort (author), Florian Bociort (author), J.J.M. Braat (author), JJM Braat (author)