EM

E. Maksimov

3 records found

Authored

Birefringe induced by the spatial dispersion in deep UV Lithography: Theory and advanced compensation strategy.
Journal article (2005) - A Serebriakov, E. Maksimov, F. Bociort, J.J.M. Braat

The effect of intrinsic birefringence in deep UV-lithography
Journal article (2004) - A Serebriakov, E. Maksimov, F. Bociort, J.J.M. Braat

Design of lithographic objectives including the effect of spatially induced birefringence
Journal article (2003) - A Serebriakov, E. Maksimov, F. Bociort, J.J.M. Braat