A

A Serebriakov

14 records found

Authored

Optimization and analysis of deep UV imaging systems
Doctoral thesis (2005) - A Serebriakov

Finding new local minima by switching merit functions in optical system optimization.
Journal article (2005) - A Serebriakov, F. Bociort, J.J.M. Braat

Birefringe induced by the spatial dispersion in deep UV Lithography: Theory and advanced compensation strategy.
Journal article (2005) - A Serebriakov, E. Maksimov, F. Bociort, J.J.M. Braat

Correction of the phse retardation caused by intrinsic birefringence in dep UV-Lithography
Journal article (2005) - A Serebriakov, F. Bociort, J.J.M. Braat

Saddle points in the merit function landscape of systems of thin lenses in contact
Journal article (2004) - F. Bociort, A Serebriakov, M van Turnhout

Networks of local minima in optical system optimization
Journal article (2004) - F. Bociort, E van Driel, A Serebriakov

Topography of the merit function landscape in optical system design
Journal article (2004) - E van Driel, F. Bociort, A Serebriakov

The effect of intrinsic birefringence in deep UV-lithography
Journal article (2004) - A Serebriakov, E. Maksimov, F. Bociort, J.J.M. Braat

Topography of merit function landscape in optical system design
Journal article (2003) - E van Driel, F. Bociort, A Serebriakov

Design of lithographic objectives including the effect of spatially induced birefringence
Journal article (2003) - A Serebriakov, E. Maksimov, F. Bociort, J.J.M. Braat

Optical system optimization based on the network structure of local minima
Conference paper (2003) - A Serebriakov, F. Bociort, J.J.M. Braat

Network structure of the set of local minima in optical system optimization
Journal article (2003) - F. Bociort, E van Driel, A Serebriakov

Compensation of the birefringence induced by spartial dispersion in 157 nm
Conference paper (2003) - A Serebriakov, F. Bociort, J.J.M. Braat

Spatial dispersion of crystals as a critical problem for deep UV lithography
Journal article (2003) - A Serebriakov, F. Bociort, J.J.M. Braat