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R Morton
Academic Work (1)
Journal article (1)
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Hydrogen SilsesQuioxane, a high-resolution negative tone e-beam resist, investigated for its applicability in photon-based lithographics
Journal article (2002) -
M Peuker (author)
,
MH Lim (author)
,
HI Smith (author)
,
R Morton (author)
,
A.K. van Langen-Suurling (author)
,
J Romijn (author)
,
E.W.J.M. van der Drift (author)
,
FCMJM van Delft (author)
