Advancements in healthcare technology are driving innovation through the decentralization and personalization of medicine. The convergence of Pharma, MedTech, and ECS industries has led to new medical domains, including bioelectronic medicines and personalized ultrasound. Ultrasound, particularly through Micromachined Ultrasonic Transducers (MUTs), is a key technology in these fields. MUTs, which include CMUTs (Capacitive Micromachined Ultrasonic Transducers) and PMUTs (Piezoelectric Micromachined Ultrasonic Transducers), offer benefits over traditional PZT transducers, such as lower costs and the absence of toxic materials.
This thesis focuses on pre-charged collapse-mode CMUTs, which operate without a DC bias voltage, making them suitable for in-body applications. This is achieved by embedding a charge storage layer in their dielectric. The research involved designing and testing a first and second generation of CMUTs with different charge storage layers. The second generation showed improved performance and comparable results to standard externally biased CMUTs.
The primary application explored was using pre-charged CMUTs as ultrasonic power receivers for implantable devices. The impact of lateral and angular misalignment on power efficiency was studied, with angular misalignment being most detrimental. Solutions proposed included decreasing the frequency, partitioning the receiving transducer, and using a beamforming algorithm.
Experimental evaluations showed power conversion efficiencies up to 80% with optimal load and about 50% with a resistive load at 2.5 MHz. These efficiencies are comparable to those achieved with PZT transducers but with better biocompatibility.
Finally, the thesis demonstrated the functionality of the first ultrasonically powered implantable device using pre-charged CMUTs for battery charging. The device achieved a total system efficiency of 21%, significantly better than other implantable devices using PMUT or PZT transducers.
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Capacitive micromachined ultrasonic transducers (CMUTs) with a built-in charge layer are known as a pre-charged CMUT. In our prior work, we have shown how to model and characterize the charges inside the pre-charged collapse-mode CMUT and conducted life-time test that showed that the charges trapped inside the dielectric were stable in the order of years [1]. However, our prior work focused on the use of pre-charged collapse-mode CMUTs as a way to achieve ultrasound power reception, which does not require the CMUT to be actively driven. In this work, for the first time we use pre-charged collapse-mode CMUTs with an Al2O3 charge-trapping layer to create a B-mode ultrasound image. Thus, this work shows the first example that pre-charged collapse-mode CMUTs can fully operate with only an AC voltage.@en

Aluminum Nitride (AlN) Piezoelectric Micromachined Ultrasonic Transducers (PMUTs) are gaining interest for biomedical implant power due to biocompatibility and lowtemperature processing. However, due to the low piezoelectric coefficient of AlN PMUTs, storage capacitors are often used to accumulate ultrasonic power transferred over an extended time. The accumulated energy is then used to power a DC load, which leads to a long start-up time, and insufficient duty cycle for some applications. We present an ultrasonically powered system for biomedical implants capable of delivering mW-range instantaneous power to DC loads, without pre-storing it. The system features a 25 mm2 AlN PMUT, an inductive matching network, and an application-specific power management integrated circuit(ASIC). For an acoustic intensity of 360 mW/cm2 at the surface of the PMUT, an open-circuit voltage of 1.11 V and an aperture efficiency of 30.5 % are measured. Furthermore, by connecting a series-matching inductor to the PMUT, the highest-reported power delivered to the load (PDL) of 6.4 mW is measured over an optimal load of 7.6 Ω. Finally, together with the ASIC and at the intensity of 108 mW/cm2, our system delivers 1.04 mW DC power to a 3.3 kΩ load, which is over two orders of magnitude higher than the previously reported average DC power for AlN PMUTs. @en

Micromachined Ultrasonic Transducers (MUTs) are being explored as power converters in wirelessly powered biomedical implants. This paper investigates the role of mechanical support properties in piezoelectric MUTs (PMUTs) on their power conversion efficiency. For this purpose, a finite element model (FEM) of a PMUT array was developed and integrated with an equivalent circuit model (ECM). The study considered different mechanical support scenarios, from rigidly clamped to completely free. These were numerically analyzed and validated by impedance measurements and acoustic power transfer experiments on PMUT prototypes. The results show that reducing the mass of the mechanical support increases the Q factor, leading to a significant improvement in power conversion efficiency, with an efficiency increase factor of 5.6x from the clamped to the free case. This approach can potentially enhance overall power conversion efficiency, reduce the need for matching networks, and enable miniaturization in ultrasonically powered implants.@en

Capacitive Micromachined Ultrasound Transducers (CMUTs) have many advantages compared to other ultrasonic transducer technologies, especially for implantable devices. However, they require a high bias voltage for efficient operation. To eliminate the need for an external bias voltage, a charge storage layer can be embedded in the dielectric. This study aims to compare the performance of Si 3 N 4 and Al 2 O 3 when used as a charge storage layer. By measuring the shift in the C-V curve, Si 3 N 4 exhibits a larger shift than Al 2 O 3 , indicating a better charge-trapping capability. When using the pre-charged CMUTs as power receivers, the Si 3 N 4 version harvested up to 80 mW -only a few mW more than the Al 2 O 3 - with an efficiency of about 50 %. Accelerated Lifetime Tests predict a lifetime of about 7.8 and 1.2 years for Si 3 N 4 and Al 2 O 3 respectively.@en

Recently, the applications of ultrasound transducers expanded from high-end diagnostic tools to point of care diagnostic devices and wireless power receivers for implantable devices. These new applications additionally require that the transducer technology must comply to biocompatibility and manufacturing scalability. In this respect, Capacitive Micromachined Ultrasound Transducers (CMUTs) have a strong advantage compared to the conventional PZT based transducers. However, current CMUTs require a large DC bias voltage for their operation, which limits the miniaturizability of these devices. In this study, we propose a pre-charged collapse-mode CMUT for immersive applications that can operate without an external bias by means of a charge trapping Al2O3 layer embedded in the dielectrics between the top and bottom electrodes. The built-in charge layer was analytically modeled and four layer stack combinations were investigated and characterized. The measurement results of the CMUTs were then used to fit the model and to quantify the amount and type of trapped charge. It was found that these devices polarize due to the ferroelectric-like behavior of the Al2O3, and the amount of charge stored in the charge-trapping layer was estimated to be approximately 0.02 C/m2. Their acoustic performance shows a transmit and receive sensitivity of 8.8 kPa/V and 13.1 V/MPa respectively. In addition, we show that increasing the charging temperature, the charging duration, and the charging voltage results in a higher amount of stored charge. Finally, results of ALT tests showed that these devices have a lifetime of more than 2.5 years at body temperature.@en

In the domain of ultrasonically powered biomedical implants, there is an increasing interest in cm-scale ultrasonic receivers (RX). However, when a single-element transducer is used as the RX transducer, an uneven phase distribution across the RX area can significantly reduce the harvestable power. In this paper, we investigate the impact of lateral and angular misalignment on the acoustic field phase distribution across the RX surface. We show that, for a single-element RX transducer, lateral misalignment has minimal effect on the harvestable power, whereas even small angular misalignments can cause a considerable reduction, especially for larger RX sizes. We present a potential solution that consists of subdividing a large RX transducer (e.g. 20 × 20mm2) into smaller elements, which significantly improves power transfer efficiency by taking advantage of the smaller phase variation across the surface of each element. The trade-offs between achieving a minimum acceptable power transfer efficiency and managing the increased complexity in packaging and matching circuitry are also discussed. @en

The main limitation of acoustic particle separation for microfluidic application is its low sorting efficiency. This is due to the weak coupling of surface acoustic waves (SAWs) into the microchannel. In this work, we demonstrate bulk acoustic wave (BAW) particle sorting using capacitive micromachined ultrasonic transducers (CMUTs) for the first time. A collapsed mode CMUT was driven in air to generate acoustic pressure within the silicon substrate in the in-plane direction of the silicon die. This acoustic pressure was coupled into a water droplet, positioned at the side of the CMUT die, and measured with an optical hydrophone. By using a beam steering approach, the ultrasound generated from 32 CMUT elements were added in-phase to generate a maximum peak-to-peak pressure of 0.9 MPa. Using this pressure, 10 µm latex beads were sorted almost instantaneously.@en

Background
Microelectrode arrays (MEA) enable the measurement and stimulation of the electrical activity of cultured cells. The integration of other neuromodulation methods will significantly enhance the application range of MEAs to study their effects on neurons. A neuromodulation method that is recently gaining more attention is focused ultrasound neuromodulation (FUS), which has the potential to treat neurological disorders reversibly and precisely.

Methods
In this work, we present the integration of a focused ultrasound delivery system with a multiwell MEA plate.

Results
The ultrasound delivery system was characterised by ultrasound pressure measurements, and the integration with the MEA plate was modelled with finite-element simulations of acoustic field parameters. The results of the simulations were validated with experimental visualisation of the ultrasound field with Schlieren imaging. In addition, the system was tested on a murine primary hippocampal neuron culture, showing that ultrasound can influence the activity of the neurons.

Conclusions
Our system was demonstrated to be suitable for studying the effect of focused ultrasound on neuronal cultures. The system allows reproducible experiments across the wells due to its robustness and simplicity of operation.@en

Ultrasound (US) has recently gained attention for powering and communication with implantable devices due to its short wavelength and low attenuation. However, beam mis-alignments cause a sharp decrease in the amount of transferred power and quality of communication. This work investigates a telemetry protocol that relies on the difference in the phase of the received backscattered signal to precisely focus the US on the implantable device and track it over time. The interrogation signal is generated by a linear phased array probe, and the receiver is a pre-charged collapse-mode Capacitive Micromachined Ultrasound Transducer (CMUT) connected to a load modulation circuit. Using the time/phase reversal tracking algorithm, the RX was located within 300 ms after the first modulation was detected. The ability of the algorithm to track the RX while it is moving was also tested, showing that it can reliably track it up to a speed of 1 mm/s.

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Recently, focused ultrasound has been proposed to power deeply implanted medical devices. Almost exclusively, lead zirconate titanate (PZT) transducers are used to convert acoustic energy into electrical energy. Unfortunately, these lead containing devices cannot be hermetically encapsulated since that would block the ultrasound. We propose the use of biocompatible Capacitive Micromachined Ultrasonic Transducer (CMUT) elements to replace traditional PZT transducers. In addition, to eliminate the external bias voltage, we introduced a charge trapping Al2O3 layer inside the CMUT to create a built-in bias voltage. These devices can be pre-charged and used as a receiver for US power. In this work, the viability of charged CMUTs to power deep implants was explored by investigating the effect of the charging parameters and by performing Accelerated Lifetime Tests (ALT). The estimated lifetime at body temperature ranges between 2.5 to 3.5 years at body temperature, which significantly depends on the charging parameters.@en

Implantable medical devices are becoming smaller and more deeply implanted in the human body for various applications (i.e., neurostimulation, drug delivery, bone fracture monitoring). Therefore, an efficient ultrasound power transfer link is needed to charge these devices. However, this is challenging because each ultrasound transducer has limited angular sensitivity. This work proposes a low-power telemetry protocol that can reliably feedback the power sent to the implant with backscattered ultrasound. The protocol works by sending two consecutive interrogation signals and connecting a circuit on the receiver that modulates only one of the two signals. The modulated signal can be decoded with an external ultrasound probe. In this work, the circuit was built, verified, and compared with simulation results. It was shown that the telemetry protocol could accurately localize the receiving ultrasound element at sub-mm precision at a 10 cm depth.@en

In the bioelectronic medicine field, vagus nerve stimulation (VNS) is a promising technique that is expected to treat numerous inflammatory conditions, in addition to the currently FDA approved treatment for epilepsy, depression and obesity [1]. However, current VNS techniques are still limited in the spatial resolution that they can achieve, which limits its therapeutic effect and induces side effects such as coughing, headache and throat pain. In our prior work, we presented a curved ultrasound (US) transducer array with a diameter of 2 mm and with 112 miniature US transducer elements, small enough to be wrapped around the vagus nerve for precise ultrasound nerve stimulation [2]. Due to the curved alignment of the US transducers with 48 of the elements simultaneously excited, the emitted US was naturally focused at the center of the curvature. Building on this work, we employ a beam steering technique to move the focal spot to arbitrary locations within the focal plane of the transducer array. The beam steering was controlled through an in-house built US driver system and was visualized using a pulsed laser schlieren system. The propagation of the US pulse in water was imaged and recorded. This method was found to be a rapid and effective means of visualizing the US propagation.

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Using ultrasound to power deeply implanted biomedical devices is a promising technique due to its low attenuation in body tissue and its short wavelength that allows precise focusing of the energy. Ultrasound energy harvesting conventionally has been done using lead zirconate titanate (PZT) ultrasound transducers, which uses the piezoelectric effect to convert mechanical vibration to an electrical voltage. However, PZT is typically bulky, and is not bio-compatible, and cannot be monolithically integrated with application-specific integrated circuits (ASIC). In this work, a pre-charged collapse-mode capacitive micromachined ultrasonic transducer (CMUT) was fabricated to harvest ultrasound energy. The pre-charged CMUT has a high power transfer efficiency over a wide bandwidth at optimal loading conditions; 43% at 2.15 MHz and 47% at 5.85 MHz. For the last 1.4 years, the device has been in collapse-mode, and it is still functional without any additional charging. This device will enable the development of smaller implantable biomedical devices in the future.@en