Pre-charged collapse-mode capacitive micromachined ultrasonic transducer (CMUT) for broadband ultrasound power transfer

Kawasaki, S.; Westhoek, Y.; Subramaniam, I.; Saccher, M.; Dekker, R.

doi:10.1109/WPTC51349.2021.9458104

Pre-charged collapse-mode capacitive micromachined ultrasonic transducer (CMUT) for broadband ultrasound power transfer

Conference paper (2021)

Authors

S. Kawasaki Electronic Components, Technology and Materials -

Y. Westhoek Student

I. Subramaniam Student

M. Saccher Electronic Components, Technology and Materials -

R. Dekker Electronic Components, Technology and Materials - , Philips Research

Research Group

Electronic Components, Technology and Materials () (TU Delft)

DOI: https://doi.org/10.1109/WPTC51349.2021.9458104

Capacitive micromachined ultrasonic transducer Pre-charged CMUT Ultrasound power transfer Zero-bias transducers

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Published Date

2021

Language

English

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Faculty

Electrical Engineering, Mathematics and Computer Science

Department

Microelectronics

Research Group

Electronic Components, Technology and Materials

Abstract

Using ultrasound to power deeply implanted biomedical devices is a promising technique due to its low attenuation in body tissue and its short wavelength that allows precise focusing of the energy. Ultrasound energy harvesting conventionally has been done using lead zirconate titanate (PZT) ultrasound transducers, which uses the piezoelectric effect to convert mechanical vibration to an electrical voltage. However, PZT is typically bulky, and is not bio-compatible, and cannot be monolithically integrated with application-specific integrated circuits (ASIC). In this work, a pre-charged collapse-mode capacitive micromachined ultrasonic transducer (CMUT) was fabricated to harvest ultrasound energy. The pre-charged CMUT has a high power transfer efficiency over a wide bandwidth at optimal loading conditions; 43% at 2.15 MHz and 47% at 5.85 MHz. For the last 1.4 years, the device has been in collapse-mode, and it is still functional without any additional charging. This device will enable the development of smaller implantable biomedical devices in the future.

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