Contactless handling systems for substrates hold significant potential in enhancing chip manufacturing yields by allowing the use of thinner and larger substrates, eliminating the risks associated with physical contact. This article introduces a novel contactless force actuator, employing the active air-bearing working principle, designed with a compact structure to effectively actuate substrates. The actuator features a continuous deformable air-bearing surface composed of compliant-based actuation unit cells, ensuring ease of fabrication to meet tight air-bearing tolerances. A modular design with seven unit cells is designed and manufactured to validate the performance. The results confirm that the proposed contactless actuator can be used to levitate and actuate the substrate simultaneously, in which case the maximum actuation force in the x -axis is determined to be 90 mN and a 42.5- μ m fly height in the z -axis is achieved.@en

This article introduces output prediction methods for two types of systems containing sinusoidal-input uniformly convergent (SIUC) elements. The first method considers these elements in combination with single-input single-output linear time-invariant (LTI) systems before, after, and in parallel to them. The second method considers a multiple-input multiple-output LTI system where each input is controlled by a SIUC element. The output prediction only requires frequency-response functions of the LTI elements and is fully accurate for sinusoidal inputs.

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In this note, we present an extension of the nonlinear negative imaginary (NI) systems theory to reset systems. We define the reset negative imaginary (RNI) and reset strictly negative imaginary (RSNI) systems and provide a state-space characterization of these systems in terms of linear matrix inequalities. Subsequently, we establish the conditions for the internal stability of a positive feedback interconnection of a (strictly) negative imaginary linear time-invariant plant and a reset (strictly) negative imaginary controller. The applicability of the proposed method is demonstrated in a numerical example of a reset version of a positive position feedback (PPF) controller for a plant with resonance.

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This paper examines the stability implications of integrating piezoelectric actuators into metamaterial beams, focusing on the compensation of structural damping and its effect on the system's dynamic performance. Metamaterials, characterized by their unique bandgap properties, offer potential in various engineering applications, including vibration control and energy harvesting. However, structural damping inherent in such systems can degrade these properties, prompting the use of piezoelectric actuators as a compensatory mechanism. Through a distributed parameter model and modal analysis, this study explores the temporal and spatial dynamics of the metamaterial beam and investigates how piezoelectric actuation influences the natural frequencies and mode shapes, with a particular emphasis on stability thresholds. Employing root locus analysis, the paper visualizes the transition of system stability across different levels of actuation voltage, highlighting the delicate balance between enhanced performance and stability. The findings delineate a clear operational voltage range, within which piezoelectric actuation improves bandgap properties without compromising system stability.

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In this work, the proportional Clegg integrator (PCI), a resetting proportional-integrator (PI) element, is studied with the aim of improving the performance of an industrial motion stage currently controlled by a linear controller. A novel parallel continuous reset (CR) architecture, based on the PI, is presented, along with frequency-based tuning guidelines, similar to linear time-invariant (LTI) loopshaping techniques. Open-loop higher order sinusoidal input describing functions (HOSIDFs) and pseudo-sensitivities computed through analytically derived approximate closed-loop HOSIDFs were effectively applied to predict steady-state performance. The experimental results, obtained on a wire bonding machine, confirmed that resonance-induced vibrations of the machine's base frame can be suppressed more effectively by adopting a PCI-PID controller compared to the currently used linear controller. The novel structure does not only reduce unwanted excitation of higher order harmonics of the base frame resonance, such as the series CR architecture recently introduced in literature, but also avoids amplification of noise when implemented in practice. With the novel parallel structure, a significant (32%) decrease in the root mean square (rms) of the settling error could be achieved when compared to the linear controller currently used and the series CR reset structure.

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Metamaterials have marked notable advancements in vibration damping and energy harvesting. However, the specific impact of internal coupled resonators, encompassing both linear and nonlinear types, has received limited attention from researchers. This study aims to delve into this underexplored area. Utilizing a distributed parameter model grounded in modal analysis, our research investigates the effects of these coupled resonators on metamaterial functionality. We particularly emphasize the influence of varying the position of attached masses and its consequent impact on the bandgap properties. Through developing theoretical and mathematical models for metastructural beams with internally coupled resonators, our approach facilitates future simulations and analyses. This investigation not only provides pivotal insights for the design and optimization of metamaterials but also underscores the possible potential of manipulating resonator properties to broaden their practical applications.

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Reset controllers have demonstrated their effectiveness in enhancing performance in precision motion systems. To further exploiting the potential of reset controllers, this study introduces a parallel-partial reset control structure. Frequency response analysis is effective for the design and fine-tuning of controllers in industries. However, conducting frequency response analysis for reset control systems poses challenges due to their nonlinearities. We develop frequency response analysis methods for both the open-loop and closed-loop parallel-partial reset systems. Simulation results validate the accuracy of the analysis methods, showcasing precision enhancements exceeding 100% compared to the traditional describing function method. Furthermore, we design a parallel-partial reset controller within the Proportional-Integral-Derivative (PID) control structure for a mass-spring-damper system. The frequency response analysis of the designed system indicates that, while maintaining the same bandwidth and phase margin of the first-order harmonics, the new system exhibits lower magnitudes of higher-order harmonics, compared to the traditional reset system. Moreover, simulation results demonstrate that the new system achieves lower overshoot and quicker settling time compared to both the traditional reset and linear systems.

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When a linear controller is replaced by a reset controller, it is possible to keep the gain behaviour essentially the same, while improving the phase behaviour. However, because reset control is nonlinear, higher order harmonics appear, which may deteriorate the results. In this paper, reset controllers are combined with fractional derivatives, decreasing the magnitude of higher order harmonics. In this way, better results are found in simulations of a Clegg integrator, of a FORE (first order reset element), and of a CgLp (constant in gain lead in phase) controller. The reason why better results are found is explained.@en

Bandgaps—frequency ranges with reduced vibration transmissibility in elastic structures, are an opportunity for vibration control originating from the research on elastic metamaterials. In this paper, we study the design for bandgap in slender beams with collocated piezoelectric patch transducers. While creating bandgaps using shunted transducers is a well-established research field, using structures with piezoelectric sensors, actuators, and feedback controllers for the same application has not been thoroughly explored. This paper aims to study the use of the tools originating from the active vibration control (AVC) field for bandgap generation in finite beams with collocated piezoelectric sensors and actuators. Lightly damped second-order low-pass filters are used as controllers in the same configuration as positive position feedback, widely used for active damping. To facilitate the understanding of systems behaviour, we propose a simplified model based on the Euler–Bernoulli beam theory. A modal analysis approach and an assumption of an infinite number of transducers of infinitesimal length distributed along the structure are used to predict the frequency range of the locally resonant bandgap in closed form. The experimental part of the work demonstrates the feasibility of the proposed approach for creating bandgaps in practice. Thanks to the insights from AVC, the control system can be designed purely based on experimental frequency response data without the need for a parametric model of the system. We also show that the uniform distribution of actuators is not necessary for creating bandgap, which can be achieved in a structure with a relatively small number of sparsely placed actuators and compare the obtained results with analytical predictions for ideal metastructure. Low-frequency bandgaps placed between 10 and 320 Hz are obtained in experiments.@en

This study explores the optimization of bandgap characteristics in locally resonant metastructures through advanced artificial intelligence (AI) and optimization algorithms, focusing on the accurate estimation of resonator damping ratios. By developing a novel mathematical framework for metastructure analysis, this research diverges from traditional methods, offering a more nuanced approach to bandgap manipulation. This research significantly improves metastructure modeling accuracy by precisely estimating resonator and structural damping ratios, enhancing model fidelity crucial for analysis, control strategies, and design optimization. Through a combination of model simulations and experimental validation, the efficacy of the Hybrid Genetic Algorithm-Particle Swarm Optimization (GA-PSO) algorithm is demonstrated, highlighting its potential for practical applications in engineering metastructures. This paper not only provides a robust method for estimating damping ratios but also opens new avenues for future research, including the application of machine learning techniques and the development of intelligent materials. The findings of this study contribute to the foundational understanding necessary for the advancement of mathematical modeling metamaterials, with broad implications for industries where precise vibration control is crucial.

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The frequency response analysis describes the steady-state responses of a system to sinusoidal inputs at different frequencies, providing control engineers with an effective tool for designing control systems in the frequency domain. However, conducting this analysis for closed-loop reset systems is challenging due to system nonlinearity. This paper addresses this challenge through two key contributions. First, it introduces novel analysis methods for both open-loop and closed-loop reset control systems at steady states. These methods decompose the frequency responses of reset systems into base-linear and nonlinear components. Second, building upon this analysis, the paper develops closed-loop higher-order sinusoidal-input describing functions for reset control systems at steady states. These functions facilitate the analysis of frequency-domain properties, establish a connection between open-loop and closed-loop analysis. The accuracy and effectiveness of the proposed methods are successfully validated through simulations and experiments conducted on a reset Proportional–Integral–Derivative (PID) controlled precision motion system.

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Recent studies have shown that tunable magnets (soft permanent magnets) can significantly reduce Joule heating in electromagnetic actuators. To achieve high motion accuracy and repeatability, this article proposes a novel actuator design with a linearized force-flux relation. In prior designs of variable reluctance tunable magnet actuators, the force and flux are related quadratically via a C-shaped actuator. Hybrid tunable magnet actuators based on biased fluxes are developed using lumped parameter models. Using finite element analysis, it is shown that the force-flux relation is symmetric linear around the mid position depending on the magnetic flux direction in the magnet. Within a position range of ±500 μm and a force range of ±20 N, the linear fit produces a negligible error of 0.08 N. Finally, this linear relationship is validated with a 0.03-N error in an experimental setup.

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This work proposes a novel nonlinear Proportional-Integral (PI) controller, which utilizes a generalized first-order reset element. The proposed element can achieve similar magnitude-characteristics as its linear counterpart but with less phase lag at the open-loop crossover frequency (i.e. the control bandwidth), according to a sinusoidal-input describing function (SIDF) analysis. The same can be achieved with an existing reset-based integrator, the Clegg integrator (CI). However, it is known that a Proportional-CI (PCI) element can excessively generate higher-order harmonics of its input, which are neglected in the SIDF-analysis. Furthermore, a PCI can cause a limit cycle when placed in closed-loop with certain types of plants. The novel PI controller proposed in this work can prevent the limit cycle and can reduce the generation of higher-order harmonics, while retaining the beneficial phase advantage that is associated with existing reset-based PI controllers.

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Incorporating actively implemented resonators within elastic piezoelectric metastructures presents a unique approach for vibration attenuation, enabling the creation of tuneable low-frequency bandgaps. Through feedback control, we enhance the compactness of these metastructures by integrating resonator dynamics internally. We study the influence of varying the cross-section of the base substrate and the arrangement of transducers on bandgap generation. This influence is captured by the changes in the electromechanical coupling and stiffness of the metastructure, which appear directly in the formulas for bandgap edge frequencies in ideal conditions. This relationship is illustrated with numerical examples for realistic metastructures with a finite number of transducers. Our focus is on metastructures with sensors and actuators, employing feedback control techniques for resonator implementation as an alternative to shunt circuits. When a bandgap is generated in a finite metastructure, its edge frequencies can be calculated in closed form using the assumption of an infinite number of transducers of infinitesimal length distributed along the structure.

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In this paper, the higher-order sinusoidal-input describing function (HOSIDF) of the fractional-order hybrid integrator-gain system (HIGS) is derived analytically. The HIGS element, designed as a nonlinear component, aims to overcome limitations inherent in linear control, such as the waterbed effect. The HIGS element has been generalized by replacing the integer-order integrator with a fractional one. Here, a modified version of the fractional-order HIGS (FO-HIGS) is introduced with the aim of shaping the nonlinearity at low frequencies. Additionally, this paper demonstrates that obtaining an analytical solution for the HOSIDF of the FO-HIGS enables us to gain better insight into the tuning of the control architecture.@en

In this article, the problem of the optimal reset control design for Lipschitz nonlinear systems is addressed. The reset controller includes a base linear controller and a reset law that enforces resets to the controller states. The reset law design is strongly dependent on the appropriate design of the base controller. For this reason, in this article, the base controller and reset law are simultaneously designed. More precisely, an optimal dynamic output feedback is considered as the base controller which minimizes the upper bound of a quadratic performance index, and a reset law is used to improve the transient response of the closed-loop system. This design is done in a full offline procedure. The problem is transformed into a set of linear matrix inequalities (LMIs), and the reset controller is obtained by solving an offline LMI optimization problem. Finally, two examples are presented to illustrate the effectiveness and validity of the proposed method.

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Reset controllers have demonstrated their efficacy in enhancing transient responses, such as the overshoot and response time in motion control systems. Designing these systems to meet specific transient requirements requires a method for analyzing transient responses. However, the inherent nonlinearity of reset control systems presents challenges in this regard, limiting their widespread application. This study introduces a novel method for analyzing the step responses of closed-loop reset control systems. By decomposing the step response of the reset system into piece-wise functions, with each piece-wise function computed based on linear systems, this analysis method offers new insights into understanding reset systems. Experimental validation conducted on eleven reset Proportional-Integral-Derivative (PID) control systems implemented on a precision motion stage confirms the effectiveness of the proposed method. The experimental results also underscore the applicability of the method as a tool for selecting optimized parameters and reset control structures to achieve enhanced transient responses.@en

This article explores internally coupled resonators in metamaterial systems, focusing on mechanical and electromechanical coupling. The article provides a thorough examination of stability within the context of internally coupled resonators. It establishes stability criteria, emphasizing the importance of strictly stable systems in practical applications. Furthermore, it analyzes stability through simulations, revealing how various parameters impact system behavior and highlighting the challenges and benefits of achieving stability in metamaterial systems. Additionally, the article explores the impact of damping coefficients and resonator characteristics, on displacement and power generation profiles. Nonlinear behavior in internally coupled resonators is examined, revealing the presence of bifurcation in simulation and offering insights into multi-stability and system behavior.

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Current reset elements mainly rely on the traditional zero-crossing resetting mechanism. This study introduces a reset element with a new resetting mechanism that distributes multiple resets within a single period for reset controllers with sinusoidal reference inputs. This new control element is termed "Fixed-Phase Reset Control (FPRC)". A higher-order sinusoidal input describing function is developed to analyze the frequency-domain properties of the new controller. The accuracy of this frequency-domain analytical approach is validated through simulations on three systems. Through the analysis, the new FPRC demonstrates phase lead compared to zero-crossing reset control, but it introduces nonlinearities at low frequencies.

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The frequency response describes the steady-state behavior of a control system to sinusoidal inputs across varying frequencies and serves as an effective tool for system design. In closed-loop reset control systems, frequency response analysis reveals two distinct scenarios: systems with two reset instants per steady-state cycle and systems with multiple (more than two) reset instants per cycle. Existing frequency response analyses often assume only two reset instants, which can result in inaccuracies for systems with multiple resets. Additionally, multiple resets can generate high-magnitude higher-order harmonics, which may result in system performance degradation. This study introduces a novel method to identify conditions where only two reset instants occur in closed-loop reset systems. This method allows designers to avoid multiple-reset actions during the system design phase. By ensuring the system operates with only two resets per cycle, this method enhances the accuracy of frequency response analyses that assume this condition. The effectiveness of the proposed method is validated through simulations and experimental tests on a precision motion system.

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