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CR de Boer
1 records found
1
Authored
Mechanical and structural properties of in-situ doped PECVD SiC layers for post-processing surface micromachining.
Conference paper (2001) -
HTM Pham
,
CR de Boer
,
C. Kwakernaak
,
W.G. Sloof
,
Pasqualina M Sarro
