H.J.M.C. Terhorst | TU Delft Repository

HT

H.J.M.C. Terhorst

Conference paper (1)

Journal article (2)

3 records found

1

Transient ALD simulations for a multi-wafer reactor with trenched wafers

Journal article (2007) - AM Lankhorst (author), BD Paarhuis (author), H.J.M.C. Terhorst (author), PJPM Simons (author), Chris Kleijn (author), C. R. Kleijn (author), C.R. Kleijn (author), CR Kleijn (author), Chris R. Kleijn (author)

Simulation and validation of SiO2 LPCVD from TEOS in a vertical 300 mm multi-wafer reactor

Journal article (2002) - GJ Schoof (author), C.R. Kleijn (author), Chris Kleijn (author), CR Kleijn (author), Chris R. Kleijn (author), C. R. Kleijn (author), H.E.A. Van den Akker (author), Harry E.A. Van den Akker (author), H.E.A. van den Akker (author), Harry E.A. van den Akker (author), TGM Oosterlaken (author), H.J.M.C. Terhorst (author), F. Huussen (author)

Simulation of SiO2 deposition in a vertical 300 mm LPCVD furnace

Conference paper (2002) - GJ Schoof (author), Chris Kleijn (author), C. R. Kleijn (author), C.R. Kleijn (author), CR Kleijn (author), Chris R. Kleijn (author), TGM Oosterlaken (author), F. Huussen (author), H.J.M.C. Terhorst (author)