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FH
F. Huussen
Academic Work (2)
Conference paper (1)
Journal article (1)
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2 records found
1
Simulation of SiO2 deposition in a vertical 300 mm LPCVD furnace
Conference paper (2002) -
GJ Schoof (author)
,
C.R. Kleijn (author)
,
TGM Oosterlaken (author)
,
F. Huussen (author)
,
H.J.M.C. Terhorst (author)
Simulation and validation of SiO2 LPCVD from TEOS in a vertical 300 mm multi-wafer reactor
Journal article (2002) -
GJ Schoof (author)
,
C.R. Kleijn (author)
,
H.E.A. van den Akker (author)
,
TGM Oosterlaken (author)
,
H.J.M.C. Terhorst (author)
,
F. Huussen (author)
