Transient ALD simulations for a multi-wafer reactor with trenched wafers

Journal article (2007)

Authors

AM Lankhorst External organisation
BD Paarhuis External organisation
H.J.M.C. Terhorst External organisation
PJPM Simons External organisation
C.R. Kleijn MSP/Thermal & Materials Processes
Research Group
MSP/Thermal & Materials Processes
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Published Date

2007

Language

Undefined/Unknown

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Research Group

MSP/Thermal & Materials Processes