Design and control of over-actuated lightweight 450 mm wafer chuck

Mechatronic design of an electromagnetically levitated linear positioning system using novel multi-dof actuators

Contactless linear electromechanical actuator: Experimental verification of the improved design

Mechatronic design of an ultra precision magnetically supported rotor and linear slider for optical disk

Optimal Design Strategy for a Novel Linear Electromechanical Actuator

Selection of Soft Magnetic Materials for a High Precision Positioning System Design

Design of a magnetically levitated nm-resolution linear slider

Control of a magnetically levitated slider with nm-precision

Optimal design strategy for a novel linear electromechanical actuator

Optimal design considerations for a linear actuator with active magnetic suspension

Two degree of freedom actuator for suspension and propulsion

A linear magnetic bearing with integrated long stroke propulsion - design and realization of an IU-module

Analysis and initial synthesis of a novel linear activator with active magnetic suspension