Design of a magnetically levitated nm-resolution linear slider

Conference paper (2006)

Authors

DAH Laro Mechatronic Systems Design - Mechanical, Maritime and Materials Engineering
T Porck External organisation
J.W. Spronck Mechatronic Systems Design - Mechanical, Maritime and Materials Engineering
J. van Eijk Mechatronic Systems Design - Mechanical, Maritime and Materials Engineering
AV Lebedev External organisation
Research Group
Mechatronic Systems Design (Mechanical, Maritime and Materials Engineering) (TU Delft)
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Published Date

2006

Language

Undefined/Unknown

Reuse Rights

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Faculty

Mechanical, Maritime and Materials Engineering

Department

Precision and Microsystems Engineering

Research Group

Mechatronic Systems Design