Control of a magnetically levitated slider with nm-precision

Laro, DAH; Porck, T; Spronck, J.W.; van Eijk, J.

Control of a magnetically levitated slider with nm-precision

Conference paper (2006)

Authors

DAH Laro Mechatronic Systems Design - Mechanical, Maritime and Materials Engineering

T Porck External organisation

J.W. Spronck Mechatronic Systems Design - Mechanical, Maritime and Materials Engineering

J. van Eijk Mechatronic Systems Design - Mechanical, Maritime and Materials Engineering

Research Group

Mechatronic Systems Design (Mechanical, Maritime and Materials Engineering) (TU Delft)

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Published Date

2006

Language

Undefined/Unknown

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Faculty

Mechanical, Maritime and Materials Engineering

Department

Precision and Microsystems Engineering

Research Group

Mechatronic Systems Design