Design and control of over-actuated lightweight 450 mm wafer chuck

Laro, DAH; Boshuisen, R; van Eijk, J.

Design and control of over-actuated lightweight 450 mm wafer chuck

Conference paper (2010)

Authors

DAH Laro Mechatronic Systems Design

R Boshuisen External organisation

J. van Eijk Mechatronic Systems Design

Research Group

Mechatronic Systems Design

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Published Date

2010

Language

English

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Research Group

Mechatronic Systems Design

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