T Usui | TU Delft Repository

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T Usui

Journal article (1)

1 records found

1

Approaching the limits of dielectric breakdown for SiO2 films deposited by plasma-enhanced atomic layer deposition

Journal article (2013) - T Usui (author) , CA Donelly (author) , M Logar (author) , R Sinclair (author) , Joop Schoonman (author) , FB Prinz (author)