The behaviour of deuterium incorporated into the buried oxide of SIMOX.

Rivera, A; van Veen, A; Schut, H; de Nijs, JMM; Balk, P; Alkemade, PFA

The behaviour of deuterium incorporated into the buried oxide of SIMOX.

Journal article (2000)

Authors

A Rivera Old - Section Defects in Materials

A van Veen Old - sect Radiation Physics Group (TN/RF)

H Schut Old - Section Defects in Materials

JMM de Nijs QN/Fysics of NanoElectronics

P Balk External organisation

PFA Alkemade Old - sect Electronic Materials (NS/EM)

Research Group

Old - Section Defects in Materials

To reference this document use:

http://resolver.tudelft.nl/uuid:e82c868d-c246-45cb-a696-01b7a7c69879

More Info

expand_more

Published Date

2000

Language

Undefined/Unknown

Reuse Rights

Other than for strictly personal use, it is not permitted to download, forward or distribute the text or part of it, without the consent of the author(s) and/or copyright holder(s), unless the work is under an open content license such as Creative Commons.

Research Group

Old - Section Defects in Materials

No files available

Metadata only record. There are no files for this journal article.