Kinetics of Cu segregation in AlCu (1%) submicron interconnects studied by resistance measurements

Conference paper (1997)

Authors

AJ Kalkman QN/Fysics of NanoElectronics

G.C.A.M. Janssen OLD Metals Processing, Microstructures and Properties

A.H. Verbruggen QN/Fysics of NanoElectronics

S Radelaar OLD Metals Processing, Microstructures and Properties

Research Group

QN/Fysics of NanoElectronics

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Published Date

1997

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Research Group

QN/Fysics of NanoElectronics