Polymeric strain gauges as pressure sensors for microfabricated organ-on-chips

Quiros Solano, W.F.; Gaio, N.; Silvestri, C.; Pandraud, G.; Sarro, Pasqualina M

Polymeric strain gauges as pressure sensors for microfabricated organ-on-chips

Conference paper (2017)

Authors

W.F. Quiros Solano Instituto Tecnologico de Costa Rica, Electronic Components, Technology and Materials -

N. Gaio Electronic Components, Technology and Materials -

C. Silvestri Tera-Hertz Sensing -

G. Pandraud EKL Processing -

Pasqualina M Sarro Electronic Components, Technology and Materials -

Research Group

Electronic Components, Technology and Materials () (TU Delft)

Pressure Membrane Organ-on-Chip Resistance Polydimethylsiloxane Polymeric Strain-Gauge

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Published Date

2017

Language

English

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Faculty

Electrical Engineering, Mathematics and Computer Science

Department

Microelectronics

Research Group

Electronic Components, Technology and Materials

Abstract

Polymeric (PEDOT:PSS) strain gauges embedded in PDMS membranes fabricated using a full wafer-scale fabrication process capable of realizing reproducible small features, are reported. The devices are characterized using a customized setup, which provides mechanical stretch while dynamically reading the electrical resistance. Measurements show relative resistance changes of approximately 11% for applied pressure up to 4 kPa. The process described is tailored to fabricate pressure sensors and microelectrodes for a flexible substrate-based Organ-on-Chip platform.

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