Prediction of thermo-mechanical integrity of wafer backend processes

Gonda, V; den Toonder, JMJ; Beijer, J; Zhang, GQ; van Driel, WD; Hoofman, ROJM; Ernst, L.J.

Prediction of thermo-mechanical integrity of wafer backend processes

Journal article (2004)

Authors

V Gonda Dynamics of Micro and Nano Systems - Mechanical, Maritime and Materials Engineering

JMJ den Toonder External organisation

J Beijer External organisation

GQ Zhang External organisation

WD van Driel External organisation

ROJM Hoofman External organisation

L.J. Ernst Dynamics of Micro and Nano Systems - Mechanical, Maritime and Materials Engineering

Research Group

Dynamics of Micro and Nano Systems (Mechanical, Maritime and Materials Engineering) (TU Delft)

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Published Date

2004

Language

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Faculty

Mechanical, Maritime and Materials Engineering

Department

Precision and Microsystems Engineering

Research Group

Dynamics of Micro and Nano Systems