Metal patterning on high topography surface for 3D RF devices fabrication

Pham, NP; Boellaard, E; Wien, W.H.A.; van den Brekel, LDM; Burghartz, JN; Sarro, Pasqualina M.

Metal patterning on high topography surface for 3D RF devices fabrication

Journal article (2004)

Authors

NP Pham Electronic Components, Technology and Materials -

E Boellaard Electronic Components, Technology and Materials -

W.H.A. Wien Electronic Components, Technology and Materials -

LDM van den Brekel External organisation

JN Burghartz Old - EWI Ch. Integrated Sensing Devices

Pasqualina M. Sarro Electronic Components, Technology and Materials -

Research Group

Electronic Components, Technology and Materials () (TU Delft)

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http://resolver.tudelft.nl/uuid:ab87f7d3-0078-4ad9-aae9-32d94aaeece6

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Published Date

2004

Language

Undefined/Unknown

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Faculty

Electrical Engineering, Mathematics and Computer Science

Department

Microelectronics

Research Group

Electronic Components, Technology and Materials