Mechanical reliability of a segmented silicon layer on ultra-thin polyimide substrates

Journal article (2007)

Authors

L WANG Computational Design and Mechanics - Mechanical, Maritime and Materials Engineering
A. Xiao Computational Design and Mechanics - Mechanical, Maritime and Materials Engineering
K.M.B. Jansen Computational Design and Mechanics - Mechanical, Maritime and Materials Engineering
M. Bartek Old - EWI Ch. Integrated Sensing Devices
T. Zoumpoulidis Old - EWI Ch. Integrated Sensing Devices
L.J. Ernst Computational Design and Mechanics - Mechanical, Maritime and Materials Engineering
Kouchi Zhang Computational Design and Mechanics - Mechanical, Maritime and Materials Engineering
Research Group
Computational Design and Mechanics (Mechanical, Maritime and Materials Engineering) (TU Delft)
More Info
expand_more

Published Date

2007

Language

Undefined/Unknown

Reuse Rights

Other than for strictly personal use, it is not permitted to download, forward or distribute the text or part of it, without the consent of the author(s) and/or copyright holder(s), unless the work is under an open content license such as Creative Commons.

Faculty

Mechanical, Maritime and Materials Engineering

Department

Precision and Microsystems Engineering

Research Group

Computational Design and Mechanics