Arrays of high reflectivity SiN photonic crystal membranes for cavity optomechanics

Conference paper (2018)

Authors

J.P. Pinto Moura Kavli institute of nanoscience Delft, QN/Groeblacher Lab - AS
C.M. Gartner Kavli institute of nanoscience Delft, University of Vienna, QN/Groeblacher Lab - AS
W.R. Haaxman Student, Kavli institute of nanoscience Delft
R.A. Norte Kavli institute of nanoscience Delft, Dynamics of Micro and Nano Systems - Mechanical, Maritime and Materials Engineering
S. Groeblacher Kavli institute of nanoscience Delft, QN/Groeblacher Lab - AS
Research Group
QN/Groeblacher Lab (AS) (TU Delft)
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Published Date

2018

Language

English

Reuse Rights

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Faculty

Applied Sciences

Department

QN/Quantum Nanoscience

Research Group

QN/Groeblacher Lab

Abstract

We fabricate photonic crystal SiN membranes with reflectivity > 99.9% at 1550 nm. These form a platform for studying arrays of mechanical oscillators inside optical cavities, which can potentially reach strong single-photon optomechanical coupling.