Low-loss amorphous silicon carbide photonics and its heterogeneous integration with existing high performance active/passive platforms

Conference paper (2023)

Authors

B. Rodriguez ImPhys/Esmaeil Zadeh group - AS
Roald van der Kolk Kavli institute of nanoscience Delft, QN/Kavli Nanolab Delft - AS
Samarth Aggarwal University of Oxford
Z.Z.L. Li ImPhys/Esmaeil Zadeh group - AS
Naresh Sharma ImPhys/Esmaeil Zadeh group - AS
Thomas Scholte ImPhys/Pereira group - AS
Harish Bhaskaran University of Oxford
I. E. Zadeh ImPhys/Esmaeil Zadeh group - AS
Research Group
ImPhys/Esmaeil Zadeh group (AS) (TU Delft)
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Published Date

2023

Language

English

Reuse Rights

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Faculty

Applied Sciences

Department

ImPhys/Imaging Physics

Research Group

ImPhys/Esmaeil Zadeh group

Abstract

In this work, we fabricate and characterize ring resonators on ICPCVD-deposited a-SiC films at a low temperature of 150°C, demonstrating exceptional intrinsic quality factors and low waveguide propagation losses, thus highlighting the potential for a-SiC as a valuable platform for future hybrid photonic technologies.

Files

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