Fabrication of trapped optical structures using resist reflow

Emadi, A.; Wu, H.W.; Grabarnik, S; de Graaf, G.; Wolffenbuttel, R.F.

Fabrication of trapped optical structures using resist reflow

Conference paper (2008)

Authors

A. Emadi Electronic Instrumentation -

H.W. Wu Electronic Instrumentation -

S Grabarnik Electronic Instrumentation -

G. de Graaf Electronic Instrumentation -

R.F. Wolffenbuttel Electronic Instrumentation -

Research Group

Electronic Instrumentation () (TU Delft)

Elektrotechniek Techniek Conference contrib. non-refer.

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http://resolver.tudelft.nl/uuid:50b69333-1d87-4808-a891-206419760e11

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Published Date

2008

Language

Undefined/Unknown

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Faculty

Electrical Engineering, Mathematics and Computer Science

Department

Microelectronics

Research Group

Electronic Instrumentation