The mechanical influence of the porosity and nano-scale pore size effect of the SiOC(H) dielectric film

Conference paper (2008)

Authors

C.A. Yuan Computational Design and Mechanics - Mechanical, Maritime and Materials Engineering
AE Flower External organisation
O van der Sluis Computational Design and Mechanics - Mechanical, Maritime and Materials Engineering
Kouchi Zhang Dynamics of Micro and Nano Systems - Mechanical, Maritime and Materials Engineering
L.J. Ernst Computational Design and Mechanics - Mechanical, Maritime and Materials Engineering
M Cherkaoui External organisation
W.D. van Driel Dynamics of Micro and Nano Systems - Mechanical, Maritime and Materials Engineering
Research Group
Computational Design and Mechanics (Mechanical, Maritime and Materials Engineering) (TU Delft)
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Published Date

2008

Language

Undefined/Unknown

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Faculty

Mechanical, Maritime and Materials Engineering

Department

Precision and Microsystems Engineering

Research Group

Computational Design and Mechanics