Oxygen related defects in the top silicon layer of SIMOX; the effect of thermal treatments.

Journal article (2000)

Authors

A Rivera Old - Section Defects in Materials
JMM de Nijs QN/Fysics of NanoElectronics
P Balk External organisation
A van Veen Old - sect Radiation Physics Group (TN/RF)
H. Schut Old - Section Defects in Materials
P.F.A. Alkemade Old - sect Electronic Materials (NS/EM)
Research Group
Old - Section Defects in Materials
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Published Date

2000

Language

Undefined/Unknown

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Research Group

Old - Section Defects in Materials