AD Kuypers | TU Delft Repository

AK

AD Kuypers

Conference paper (2)

Journal article (2)

4 records found

1

Gas-phase chemistry in up-scaled plasma enhanced metal-organic chemical-vapor deposition of TiN and Ti(C,N) on tool steel.

Journal article (2000) - J. Driessen (author), AD Kuypers (author), J Schoonman (author), Joop Schoonman (author), J. Schoonman (author)

Transamination in pulsed DC-plasma enhanced CVD of Ti(C,N) from TDMAT.

Conference paper (1999) - J. Driessen (author), AD Kuypers (author), J Schoonman (author), Joop Schoonman (author), J. Schoonman (author)

Optimisation of the MOCVD of Ti(C,N) in a pulsed H2-N2 plasma by gas-phase analysis

Conference paper (1999) - JPAM Driessen (author), AD Kuypers (author), J Schoonman (author), J. Schoonman (author), Joop Schoonman (author)

A mass-spectroscopical study of the decomposition of Ti(NMe2)4 in a mixed Ar-H2-N2 pulsed d.c. plasma.

Journal article (1998) - YPM Driessens (author), AD Kuypers (author), J Schoonman (author), Joop Schoonman (author), J. Schoonman (author)