Gas-phase chemistry in up-scaled plasma enhanced metal-organic chemical-vapor deposition of TiN and Ti(C,N) on tool steel.

Journal article (2000)

Authors

J. Driessen External organisation
AD Kuypers External organisation
J Schoonman Old - sect Laboratory Inorganic Chemistry (DCT/AC)
Research Group
Old - sect Laboratory Inorganic Chemistry (DCT/AC)
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Published Date

2000

Language

Undefined/Unknown

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Research Group

Old - sect Laboratory Inorganic Chemistry (DCT/AC)