Optimisation of the MOCVD of Ti(C,N) in a pulsed H2-N2 plasma by gas-phase analysis

Driessen, JPAM; Kuypers, AD; Schoonman, J

Optimisation of the MOCVD of Ti(C,N) in a pulsed H2-N2 plasma by gas-phase analysis

Conference paper (1999)

Authors

JPAM Driessen Old - sect Laboratory Inorganic Chemistry (DCT/AC)

AD Kuypers External organisation

J Schoonman Old - sect Laboratory Inorganic Chemistry (DCT/AC)

Research Group

Old - sect Laboratory Inorganic Chemistry (DCT/AC)

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Published Date

1999

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Research Group

Old - sect Laboratory Inorganic Chemistry (DCT/AC)