T Machielsen | TU Delft Repository

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T Machielsen

Conference paper (2)

2 records found

1

Backwafer optical lithography and wafer distortion in substrate transfer technologies

Conference paper (2000) - Henk van Zeijl (author), H.W. Van Zeijl (author), HW van Zeijl (author), H.W. van Zeijl (author), HW Van Zeijl (author), Henk Van Zeijl (author), JHCM Slabbekoorn (author), LK Nanver (author), L.K. Nanver (author), PWL van Dijk (author), A Berthold (author), T Machielsen (author)

Front- to backwafer alignment, overlay and wafer distortion in substrate transfer technologies

Conference paper (2000) - HW van Zeijl (author), Henk van Zeijl (author), H.W. Van Zeijl (author), HW Van Zeijl (author), Henk Van Zeijl (author), H.W. van Zeijl (author), JHCM Slabbekoorn (author), L.K. Nanver (author), LK Nanver (author), PWL van Dijk (author), T Machielsen (author)