T Machielsen | TU Delft Repository

TM

T Machielsen

Conference paper (2)

2 records found

1

Front- to backwafer alignment, overlay and wafer distortion in substrate transfer technologies

Conference paper (2000) - H. Zeijl (author) , JHCM Slabbekoorn (author) , L. K. Nanver (author) , PWL van Dijk (author) , T Machielsen (author)

Backwafer optical lithography and wafer distortion in substrate transfer technologies

Conference paper (2000) - H.W. Van Zeijl (author) , JHCM Slabbekoorn (author) , L.K. Nanver (author) , PWL van Dijk (author) , A Berthold (author) , T Machielsen (author)