Front- to backwafer alignment, overlay and wafer distortion in substrate transfer technologies

van Zeijl, H.W.; Slabbekoorn, JHCM; Nanver, L.K.; van Dijk, PWL; Machielsen, T

Front- to backwafer alignment, overlay and wafer distortion in substrate transfer technologies

Conference paper (2000)

Authors

H.W. van Zeijl Electronic Components, Technology and Materials -

JHCM Slabbekoorn Electronic Components, Technology and Materials -

L.K. Nanver Electronic Components, Technology and Materials -

PWL van Dijk External organisation

T Machielsen External organisation

Research Group

Electronic Components, Technology and Materials () (TU Delft)

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Published Date

2000

Language

Undefined/Unknown

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Faculty

Electrical Engineering, Mathematics and Computer Science

Department

Microelectronics

Research Group

Electronic Components, Technology and Materials