The scattering properties of transparent conductive oxide (TCO) layers are fundamentally related to the performance of thin film silicon solar cells. In this study we introduce an experimental technique to access light scattering properties at textured TCO-silicon interfaces. Therefore we prepared a sample with a polished microcrystalline silicon layer, which is deposited onto a rough TCO layer. We used the measured results to validate calculations obtained with rigorous diffraction theory, i.e. a numerical solution of Maxwell's equations. Furthermore we evaluated four approximate models based on the scalar scattering theory and ray tracing and compared them to the rigorous diffraction theory.@en

Textured interfaces in thin-film silicon solar cells improve the efficiency by light scattering. A technique to get experimental access to the angular intensity distribution (AID) at textured interfaces of the transparent conductive oxide (TCO) and silicon is introduced. Measurements are performed on a sample with polished microcrystalline silicon layer deposited onto a rough TCO layer. The AID determined from the experiment is used to validate the AID obtained by a rigorous solution of Maxwell¿s equations. Furthermore, the applicability of other theoretical approaches based on scalar scattering theory and ray tracing is discussed with respect to the solution of Maxwell¿s equations.@en