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A
A Nichelatti
Academic Work (2)
Conference paper (2)
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2 records found
1
High aspect ratio through-wafer interconnections for 3D-microsystems
Conference paper (2003) -
L Wang (author)
,
A Nichelatti (author)
,
H. Schellevis (author)
,
C.R. de Boer (author)
,
C.C.G. Visser (author)
,
NT Nguyen (author)
,
Pasqualina M Sarro (author)
Realization of high aspect ratio interconnections based on macroporous silicon
Conference paper (2002) -
A Nichelatti (author)
,
NT Nguyen (author)
,
Pasqualina M Sarro (author)