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SG
S Godey
2 records found
1
Authored
Gettering by overpressurized bubbles induced by high-energy He-implantation in silicon
Conference paper (2002) -
G Regula
,
R El Bouayadi
,
B Pichaud
,
S Godey
,
R Delamare
,
E Ntsoenzok
,
A van Veen
Helium desorption from cavities induced by 3-He and 4-He implantation in silicon
Journal article (2000) -
S Godey
,
E Ntsoenzok
,
T Sauvage
,
A van Veen
,
F. Labohm
,
MF Beaufort
,
JF Barbot
