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Conference paper (1)

1 records found

1

Gettering by overpressurized bubbles induced by high-energy He-implantation in silicon

Conference paper (2002) - G Regula (author) , R El Bouayadi (author) , B Pichaud (author) , S Godey (author) , R Delamare (author) , E Ntsoenzok (author) , A van Veen (author)