J. Eijk | TU Delft Repository

JE

J. Eijk

Conference paper (1)

1 records found

1

A quantitative evaluation of pattern transfer across (111) surfaces in a (100) silicon wafer by contact masking and over-exposure

Conference paper (2004) - Warner Venstra (author), W.J. Venstra (author), WJ Venstra (author), M Laros (author), J.W. Spronck (author), Jo Spronck (author), PM Sarro (author), Pasqualina Sarro (author), Pasqualina M Sarro (author), Pasqualina M. Sarro (author), Lina Sarro (author), J. Eijk (author)