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MN
MD Nguyen
Academic Work (2)
Journal article (2)
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2 records found
1
The extraordinary role of the AlN interlayer in growth of AlN sputtered on Ti electrodes
Journal article (2013) -
A.T. Tran (author)
,
G. Pandraud (author)
,
F.D. Tichelaar (author)
,
MD Nguyen (author)
,
H. Schellevis (author)
,
Pasqualina M Sarro (author)
Slender piezoelectric cantilevers of high quality AlN layers sputtered on Ti thin film for MEMS actuators
Journal article (2013) -
A.T. Tran (author)
,
O Wunnicke (author)
,
G. Pandraud (author)
,
MD Nguyen (author)
,
H. Schellevis (author)
,
Pasqualina M Sarro (author)
