Slender piezoelectric cantilevers of high quality AlN layers sputtered on Ti thin film for MEMS actuators

Tran, A.T.; Wunnicke, O; Pandraud, G.; Nguyen, MD; Schellevis, H.; Sarro, Pasqualina M

Slender piezoelectric cantilevers of high quality AlN layers sputtered on Ti thin film for MEMS actuators

Journal article (2013)

Authors

A.T. Tran Electronic Components, Technology and Materials -

O Wunnicke External organisation

G. Pandraud Electronic Components, Technology and Materials -

MD Nguyen External organisation

H. Schellevis Electronic Components, Technology and Materials -

Pasqualina M Sarro Electronic Components, Technology and Materials -

Research Group

Electronic Components, Technology and Materials () (TU Delft)

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http://resolver.tudelft.nl/uuid:66adca23-4f5d-45e4-918d-437396c2ea92

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Published Date

2013

Language

English

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Faculty

Electrical Engineering, Mathematics and Computer Science

Department

Microelectronics

Research Group

Electronic Components, Technology and Materials