MJ Teepen | TU Delft Repository

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MJ Teepen

Journal article (1)

1 records found

1

Chemical vs. Physical factors in dry etching induced damage in the Si/GexSi1-x system

Journal article (1997) - RG van Veen (author), MJ Teepen (author), E.W.J.M. van der Drift (author), T Zijlstra (author), K Werner (author), A.H. Verbruggen (author), S Radelaar (author)