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A back-wafer contacted silicon-on-glass integrated bipolar process - Part I: the conflict electrical versus thermal isolation
Journal article (2004) -
L.K. Nanver (author)
,
N Nenadovic (author)
,
V d' Alessandro (author)
,
H. Schellevis (author)
,
H.W. van Zeijl (author)
,
R. Dekker (author)
,
DB de Mooij (author)
,
V Zieren (author)
,
JW Slotboom (author)