A van Dijken | TU Delft Repository

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A van Dijken

Conference paper (1)

1 records found

1

Mechanical characterization and modeling of low-dielectric-constant SiLK films using nano-indentation: time- and temperature-effects

Conference paper (2003) - J den Toonder (author), A van Dijken (author), V Gonda (author), J Beijer (author), K Zhang (author), L.J. Ernst (author)