Mechanical characterization and modeling of low-dielectric-constant SiLK films using nano-indentation: time- and temperature-effects

Conference paper (2003)

Authors

Jaap Den den Toonder External organisation
A van Dijken External organisation
V Gonda Dynamics of Micro and Nano Systems
J Beijer External organisation
K Zhang External organisation
LJ Ernst Dynamics of Micro and Nano Systems
Research Group
Dynamics of Micro and Nano Systems
More Info
expand_more

Published Date

2003

Language

Undefined/Unknown

Reuse Rights

Other than for strictly personal use, it is not permitted to download, forward or distribute the text or part of it, without the consent of the author(s) and/or copyright holder(s), unless the work is under an open content license such as Creative Commons.

Research Group

Dynamics of Micro and Nano Systems

No files available

Metadata only record. There are no files for this conference paper.