Mechanical characterization and modeling of low-dielectric-constant SiLK films using nano-indentation: time- and temperature-effects

den Toonder, J; van Dijken, A; Gonda, V; Beijer, J; Zhang, K; Ernst, L.J.

Mechanical characterization and modeling of low-dielectric-constant SiLK films using nano-indentation: time- and temperature-effects

Conference paper (2003)

Authors

J den Toonder External organisation

A van Dijken External organisation

V Gonda Dynamics of Micro and Nano Systems - Mechanical, Maritime and Materials Engineering

J Beijer External organisation

K Zhang External organisation

L.J. Ernst Dynamics of Micro and Nano Systems - Mechanical, Maritime and Materials Engineering

Research Group

Dynamics of Micro and Nano Systems (Mechanical, Maritime and Materials Engineering) (TU Delft)

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Published Date

2003

Language

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Faculty

Mechanical, Maritime and Materials Engineering

Department

Precision and Microsystems Engineering

Research Group

Dynamics of Micro and Nano Systems