MJ van Bruggen | TU Delft Repository

Mv

MJ van Bruggen

Conference paper (3)

Journal article (7)

10 records found

1

Electron optics of skewed micro-Einzel lenses

Journal article (2009) - MJ van Bruggen (author), B van Someren (author), P. Kruit (author)

Multibeam Electron Source using MEMS Electron Optical Components

Journal article (2006) - B van Someren (author), MJ van Bruggen (author), Y Zhang (author), C.W. Hagen (author), P. Kruit (author)

Integrated Multi-electron-beam blanker array for sub-10-nm electron beam induced deposition

Journal article (2006) - Y Zhang (author), C.T.H. Heerkens (author), MJ van Bruggen (author), P. Kruit (author)

Aberration model of a multi beam scanning microscope for electron beam-induced deposition

Journal article (2006) - MJ van Bruggen (author), B van Someren (author), P. Kruit (author)

Multi Beam electron source for nanofabrication using electron beam induced deposition

Journal article (2006) - MJ van Bruggen (author), B van Someren (author), P. Kruit (author)

Multibeam electron source for nanofrabrication and multibeam imaging

Conference paper (2005) - B van Someren (author), MJ van Bruggen (author), P. Kruit (author)

Development of a multi electron beam source for sub-10 nm electron beam induced deposition

Journal article (2005) - MJ van Bruggen (author), B van Someren (author), P. Kruit (author)

Design Approach for a Multi Beam Electron Beam Induced Deposition System

Journal article (2005) - B van Someren (author), MJ van Bruggen (author), P. Kruit (author)

Electron microlenses and microlens arrays

Conference paper (2004) - MJ van Bruggen (author), B van Someren (author), P. Kruit (author)

Electron beam induced deposition and in-situ inspection of sub-10 nm structures

Conference paper (2004) - MJ van Bruggen (author), W.F. van Dorp (author), B van Someren (author), N Silvis-Cividjian (author), C.W. Hagen (author), P. Kruit (author)