Electron beam induced deposition and in-situ inspection of sub-10 nm structures

van Bruggen, MJ; van Dorp, W.F.; van Someren, B; Silvis-Cividjian, N; Hagen, C.W.; Kruit, P.

Electron beam induced deposition and in-situ inspection of sub-10 nm structures

Conference paper (2004)

Authors

MJ van Bruggen ImPhys/Charged Particle Optics

W.F. van Dorp ImPhys/Charged Particle Optics

B van Someren ImPhys/Charged Particle Optics

N Silvis-Cividjian ImPhys/Charged Particle Optics

C.W. Hagen ImPhys/Charged Particle Optics

P. Kruit ImPhys/Charged Particle Optics

Research Group

ImPhys/Charged Particle Optics

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Published Date

2004

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Research Group

ImPhys/Charged Particle Optics